Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide for students and professionals.Hinweis: Dieser Artikel kann nur an eine deutsche Lieferadresse ausgeliefert werden.
Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research consortium under the National Institute of Standards and Technology's Advanced Technology Program (ATP) to develop a new process for optical MEMS, and he has over 80 patents.
Inhaltsangabe
1. Introduction 2. Micro-mechanics 3. Electrostatics 4. Optical MEMS 5. Thermal MEMS 6. Fluidic MEMS 7. Package and test 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
