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Ultra-Precision Engineering (UPE) is a comprehensive field that concerns the design, manufacture and measurement of ultra-precision components and systems. With the progress of new solutions to UPE, the demand of advanced mechatronic systems with high-performance on freedom, stroke, resolution, accuracy and bandwidth has been continuously increasing. This Special Issue is a collection of 13 excellent research papers published in Actuators, showcasing and discussing new advances in actuators and mechatronic systems for UPE as well as ultra-precision machines.