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Chemical vapour deposition is an important
technological process employed in a variety of
industries to produce thin films of functional
materials. It is a particularly important process
in the semi-conductor and micro-electronics
industries. It is an increasingly important
technique in the glazing industry and in new
materials discovery. This book provides information
on the chemical vapour deposition setup and process,
the deposition and characterisation of main group
metal phosphides and oxide compounds, the use of
metal oxide thin films in solid state metal oxide
semi-conductor gas sensor devices as well as insight
in to new chemical vapour deposition techniques.
This manuscript is aimed at those working in the
area of thin films both in industry and academia,
and is especially applicable to those interested in
the development of new techniques.
technological process employed in a variety of
industries to produce thin films of functional
materials. It is a particularly important process
in the semi-conductor and micro-electronics
industries. It is an increasingly important
technique in the glazing industry and in new
materials discovery. This book provides information
on the chemical vapour deposition setup and process,
the deposition and characterisation of main group
metal phosphides and oxide compounds, the use of
metal oxide thin films in solid state metal oxide
semi-conductor gas sensor devices as well as insight
in to new chemical vapour deposition techniques.
This manuscript is aimed at those working in the
area of thin films both in industry and academia,
and is especially applicable to those interested in
the development of new techniques.