Anthony C. Jones, Paul O'Brien

CVD of Compound Semiconductors

Precursor Synthesis, Development and Applications

• Gebundenes Buch

Produktbeschreibung

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book details the deposition methods available for different materials and makes the chemistry of deposition accessible to the materials scientist.

Produktdetails

• Verlag: Wiley-VCH
• Seitenzahl: 338
• Englisch
• Abmessung: 245mm
• Gewicht: 782g
• ISBN-13: 9783527292943
• Artikelnr.: 26674988