Martín Zalazar

Development of Mass Microsensors for Implantable MEMS

• Broschiertes Buch

Produktbeschreibung

Glaucoma is a disease that affects tens of millions of people around the world. The development of MEMS and the generation of new materials allow the development of implantable micro-devices with improved biocompatibility. The knowledge of biomolecules associated with the glaucoma pathology will increase the effectiveness of a microvalve for glaucoma tretmentt. In this sense, a mass microsensor capable of sensing biomolecules is desirable. This book was focused on the design, simulation, fabrication and characterization of MEMS-based mass microsensors for the detection of biomolecules. Regarding the biocompatibility, UNCD and Parylene were used as structural materials; as piezoelectric materials, quartz, PVDF and AlN were used. The parameters of the resonators were extracted by using 3D FEM models and experimental results. UNCD films used as substrate, yielded a highly oriented (002) AlN films even as thin as 80 nm; it exhibited a piezoelectric coefficient of about 5.3 pm/V, one of the highest demonstrated today. AlN/diamond structure is a very promising device for FBAR applications so it opens a huge field of biomedical applications.

Produktdetails

• Verlag: Scholar's Press
• Seitenzahl: 268
• Erscheinungstermin: 5. Januar 2015
• Englisch
• Abmessung: 220mm x 150mm x 17mm
• Gewicht: 417g
• ISBN-13: 9783639708363
• ISBN-10: 3639708369
• Artikelnr.: 40503432

Autorenporträt

Postdoctoral position at the Laboratory of BioMEMS at FI-UNER, Argentina. PhD degree in Engineering Sciences, Field of Computational Mechanics in 2013 at FICH, Argentina. Fellowship for researchers (Fulbright-Bunge y Born) during 2011-2012 at Argonne National Laboratory, USA. Bioengineering degree at FI-UNER in 2007.