Electrostatically Actuated MEMS for mass and gas detection - Bouchaala, Adam
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In recent years, MEMS (Micro-Electro-Mechanical-Systems) sensors have triggered significant interest in utilizing their unique properties to detect with great accuracy physical quantities, such as small gas concentrations, minute biological entities, and very small changes in temperature and pressure. Particularly, mass detection of very small biological elements using MEMS devices, such as viruses, bacteria, and cells, has gained increasing attention in recent years. In the other hand, electrostatically actuated structures in flexure vibrations have not been commonly used for mass and gas…mehr

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Produktbeschreibung
In recent years, MEMS (Micro-Electro-Mechanical-Systems) sensors have triggered significant interest in utilizing their unique properties to detect with great accuracy physical quantities, such as small gas concentrations, minute biological entities, and very small changes in temperature and pressure. Particularly, mass detection of very small biological elements using MEMS devices, such as viruses, bacteria, and cells, has gained increasing attention in recent years. In the other hand, electrostatically actuated structures in flexure vibrations have not been commonly used for mass and gas detection applications due to their low quality factor. This is because of the dominant effect of squeeze-film damping and the complexity of keeping the testing chamber under the same conditions for real time measurement upon gas exposure and nitrogen purging. In this book we present theoretical and experimental investigations of several approaches for mass and gas detection based on the dynamics of micro-electro-mechanical systems MEMS beams.
Autorenporträt
Adam Bouchaala studied Mechatronics at SUPMECA-Paris,France and Electromechanical Engineering in the National School of Engineers of Sfax (ENIS),Tunisia. He worked as a nanotechnology researcher in the Swiss Federal Institute of Technology Lausanne. In October 2017, Adam joined Imperial College London as a postgraduate researcher in nanotechnology.