Andere Kunden interessierten sich auch für
![Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set]( "Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set")
Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set424,99 €![Electrical Conductive Adhesives with Nanotechnologies]( "Electrical Conductive Adhesives with Nanotechnologies")
Electrical Conductive Adhesives with Nanotechnologies125,99 €![RF Mems Switches and Integrated Switching Circuits]( "RF Mems Switches and Integrated Switching Circuits")
RF Mems Switches and Integrated Switching Circuits110,99 €![Microstereolithography and Other Fabrication Techniques for 3D Mems]( "Microstereolithography and Other Fabrication Techniques for 3D Mems")
Microstereolithography and Other Fabrication Techniques for 3D Mems293,99 €![Mems Linear and Nonlinear Statics and Dynamics]( "Mems Linear and Nonlinear Statics and Dynamics")
Mems Linear and Nonlinear Statics and Dynamics110,99 €![RF Mems]( "RF Mems")
RF Mems224,99 €![Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials]( "Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials")
Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials370,99 €
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.