Lead zirconate titanate PZT piezoceramic had been researched extensively to improve its piezoelectric properties for various applications in actuators resonators transducers etc In this book PZT piezoceramics prepared at a composition Zr Ti 53 47 contiguous to a morphotropic phase boundary MPB with gel powder synthesized by the chemical solution deposition CSD method utilizing less hazardous propyl alcohol as a solvent were developed The PZT thin films with lower gel concentration of 0 2 M and 0 3 M were used and deposited on Al Si3N4 Si 100 substrate Besides we also fabricated a device on PZT ferroelectric thin films by lift off method for a SAW resonator
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