Focused Ion Beam Systems
Basics and Applications
Herausgeber: Yao, Nan
Focused Ion Beam Systems
Basics and Applications
Herausgeber: Yao, Nan
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This edited volume, first published in 2007, comprehensively covers the focused ion beam and two beam technology.
This edited volume, first published in 2007, comprehensively covers the focused ion beam and two beam technology.
Produktdetails
- Produktdetails
- Verlag: Cambridge University Press
- Seitenzahl: 408
- Erscheinungstermin: 26. August 2010
- Englisch
- Abmessung: 244mm x 170mm x 23mm
- Gewicht: 701g
- ISBN-13: 9780521158596
- ISBN-10: 0521158591
- Artikelnr.: 32302008
- Verlag: Cambridge University Press
- Seitenzahl: 408
- Erscheinungstermin: 26. August 2010
- Englisch
- Abmessung: 244mm x 170mm x 23mm
- Gewicht: 701g
- ISBN-13: 9780521158596
- ISBN-10: 0521158591
- Artikelnr.: 32302008
List of contributors; Preface; 1. Introduction to the focused ion beam
system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3.
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive
Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams
Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM
DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6.
High-density FIB-SEM 3D nanotomography: with applications of real-time
imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale
structures using ion beams Ampere A. Tseng; 8. Preparation for
physico-chemical analysis Richard Langford; 9. In-situ sample manipulation
and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10.
Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional
visualization of nanostructured materials using focused ion beam tomography
Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of
surface layers Daniel Recht and Nan Yao; 13. Applications for biological
materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a
multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and
Takashi Kaito; Index.
system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3.
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive
Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams
Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM
DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6.
High-density FIB-SEM 3D nanotomography: with applications of real-time
imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale
structures using ion beams Ampere A. Tseng; 8. Preparation for
physico-chemical analysis Richard Langford; 9. In-situ sample manipulation
and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10.
Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional
visualization of nanostructured materials using focused ion beam tomography
Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of
surface layers Daniel Recht and Nan Yao; 13. Applications for biological
materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a
multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and
Takashi Kaito; Index.
List of contributors; Preface; 1. Introduction to the focused ion beam
system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3.
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive
Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams
Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM
DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6.
High-density FIB-SEM 3D nanotomography: with applications of real-time
imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale
structures using ion beams Ampere A. Tseng; 8. Preparation for
physico-chemical analysis Richard Langford; 9. In-situ sample manipulation
and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10.
Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional
visualization of nanostructured materials using focused ion beam tomography
Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of
surface layers Daniel Recht and Nan Yao; 13. Applications for biological
materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a
multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and
Takashi Kaito; Index.
system Nan Yao; 2. Interaction of ions with matter Nobutsugu Imanishi; 3.
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive
Chandler and Matthew Weschler; 4. Imagining using electrons and ion beams
Kaoru Ohya and Tohru Ishitani; 5. Characterization methods using FIB/SEM
DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi; 6.
High-density FIB-SEM 3D nanotomography: with applications of real-time
imaging during FIB milling E. L. Principe; 7. Fabrication of nanoscale
structures using ion beams Ampere A. Tseng; 8. Preparation for
physico-chemical analysis Richard Langford; 9. In-situ sample manipulation
and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani; 10.
Micro-machining and mask repair Mark Utlaut; 11. Three-dimensional
visualization of nanostructured materials using focused ion beam tomography
Derren Dunn, Alan J. Kubis and Robert Hull; 12. Ion beam implantation of
surface layers Daniel Recht and Nan Yao; 13. Applications for biological
materials Kirk Hou and Nan Yao; 14. Focused ion beam systems as a
multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and
Takashi Kaito; Index.