This monograph is devoted to various aspects of term rise and operation and to general terminology assessment as a field vocabulary and as an independent discipline. It is stated that application of statistical and analytical methods takes into account natural features of the objects of study, including terminology and linguistics in general. The basic lexical semantic relations in the Ukrainian physics terminology (polysemy, homonymy, synonymy), are studied, where relevant comparison with the English and German physics terms is carried out. It is shown also that there are a number of objective reasons for synonymy emergence in the Ukrainian physics terminology and in terminology in general, where it is expedient to distinguish the formal and contentual synonymy. The semantic distances between synonyms, homonyms, and polysemants were estimated that has practical value for automatic separation of these. The borrowings in Ukrainian as a linguistic and terminological problem are studied on the basis of etymological, comparative, morphosemantic, and acoustic phonetic analysis. An analysis of Greek sources studying etymology of the word " mi " (English "chemistry"), is carried out.