Richard Leach

Fundamental Principles of Engineering Nanometrology

• Gebundenes Buch

Produktbeschreibung

2nd edition. Nanometrology demystified for a wide audience of engineers, scientists and students.

Produktdetails

• Verlag: Elsevier Science
• 2nd edition
• Seitenzahl: 384
• Erscheinungstermin: 3. Juni 2014
• Englisch
• Abmessung: 243mm x 200mm x 25mm
• Gewicht: 975g
• ISBN-13: 9781455777532
• ISBN-10: 1455777536
• Artikelnr.: 39185485

Autorenporträt

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Inhaltsangabe

1. Introduction to metrology for micro- and nanotechnology2. Some basics of
measurement3. Precision measurement instrumentation - some design
principles4. Length traceability using interferometry5. Displacement
measurement6. Surface topography measurement instrumentation7. Scanning
probe and particle beam microscopy8. Surface topography characterization9.
Co-ordinate metrology10. Mass and force measurement