Marc J Madou

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

• Broschiertes Buch

Produktbeschreibung

The first volume in this set offers a rigorous theoretical treatment of micro- and nanosciences and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. The text is illustrated in color throughout and contains worked-out examples and end-of-chapter problems. Ancillaries are available with qualifying course adoption.

Produktdetails

• Verlag: Taylor & Francis Ltd (Sales)
• 3rd edition
• Seitenzahl: 1992
• Erscheinungstermin: 13. Juli 2011
• Englisch
• Abmessung: 287mm x 227mm x 88mm
• Gewicht: 5580g
• ISBN-13: 9780849331800
• ISBN-10: 0849331803
• Artikelnr.: 26575456

Autorenporträt

Marc J. Madou, University of California, Irvine USA.

Inhaltsangabe

Volume 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS.
Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon
Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and
Optical Analytical Techniques. Volume 2: Lithography. Pattern Transfer with
Subtractive Techniques. Pattern Transfer with Additive Techniques. Volume
3: From Traditional Manufacturing to Nanotechnology. Scaling Laws,
Actuators, and Power and Brains in Miniature Devices.