Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
Table of Contents:
Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined Devices .- Bonding and Packaging .- Quantum Structures and Molecular Engineering .- Appendices.-
Table of Contents:
Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined Devices .- Bonding and Packaging .- Quantum Structures and Molecular Engineering .- Appendices.-