Requiring no prior expertise in optical dimensional metrology, this handbook helps readers understand the capabilities and limitations of optical metrology methods. It shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. After building a foundation for evaluating optical measureme
Requiring no prior expertise in optical dimensional metrology, this handbook helps readers understand the capabilities and limitations of optical metrology methods. It shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems. After building a foundation for evaluating optical measureme
Kevin Harding is a principal scientist at GE Research in Niskayuna, New York, where he leads work in optical metrology at the R&D center and provides guidance to a wide range of optical technology projects. Internationally recognized for his work in 3D measurement technology, he has received numerous honors, including the Automated Imaging Association Leadership Award and the SME Eli Whitney Productivity Award. A SPIE fellow, Harding has published over 120 technical papers, taught more than 60 short courses and tutorials, contributed sections to six books, and received over 55 patents.
Inhaltsangabe
Optical Metrology: Introduction. Optical Metrology of Larger Objects. Optical Metrology of Medium Size Objects. Optical Micro Metrology of Small Objects. Advanced Optical Micro Metrology Methods. Index.