High Energy Density Technologies in Materials Science
Proceedings of the 2nd IGD Scientific Workshop, Novara, May 3¿4, 1988
Herausgegeben:Garbassi, F.; Occhiello, E.
High Energy Density Technologies in Materials Science
Proceedings of the 2nd IGD Scientific Workshop, Novara, May 3¿4, 1988
Herausgegeben:Garbassi, F.; Occhiello, E.
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Proceedings of the 2nd Scientific Workshop, Novara, May 3-4, 1989
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Produktdetails
- Produktdetails
- Verlag: Springer Netherlands / Springer, Berlin
- Softcover reprint of the original 1st ed. 1990
- Seitenzahl: 184
- Erscheinungstermin: 28. September 2011
- Englisch
- Abmessung: 235mm x 155mm x 11mm
- Gewicht: 289g
- ISBN-13: 9789401067102
- ISBN-10: 9401067104
- Artikelnr.: 39505382
- Herstellerkennzeichnung
- Books on Demand GmbH
- In de Tarpen 42
- 22848 Norderstedt
- info@bod.de
- 040 53433511
- Verlag: Springer Netherlands / Springer, Berlin
- Softcover reprint of the original 1st ed. 1990
- Seitenzahl: 184
- Erscheinungstermin: 28. September 2011
- Englisch
- Abmessung: 235mm x 155mm x 11mm
- Gewicht: 289g
- ISBN-13: 9789401067102
- ISBN-10: 9401067104
- Artikelnr.: 39505382
- Herstellerkennzeichnung
- Books on Demand GmbH
- In de Tarpen 42
- 22848 Norderstedt
- info@bod.de
- 040 53433511
I: Keynote lectures.- Lithography for High Energy Technology in Microelectronics.- Crosslinking of Industrial Products by High Energy Electron Beams.- Modification of Surface State of Polymers by Glow Discharge Plasmas.- II: Tutorial lectures.- New Frontiers in Materials Processing Using Thermal Plasma Technology.- Deposition and Etching of Fluoropolymer Films by Plasma Technique.- Amorphous Carbon Films.- Materials Processing with Pulsed Electron Beam.- Ion Beam Treatment of Polymers.- UV Lasers and Polymers.- III: Contributed papers.- Kinetic Aspect of PACVD Modeling.- Advanced Technologies for ULSI Device Production.- Design/Operating Parameters Optimization of an Electron Accelerator for Surface Treatments on Materials through Irradiation.- CF4/O2 Plasma Etching of Polymers.- Laser Induced Surface Modification of Polymers.- Wetting Behavior of Oxygen Plasma Treated PTFE.- Author Index.
I: Keynote lectures.- Lithography for High Energy Technology in Microelectronics.- Crosslinking of Industrial Products by High Energy Electron Beams.- Modification of Surface State of Polymers by Glow Discharge Plasmas.- II: Tutorial lectures.- New Frontiers in Materials Processing Using Thermal Plasma Technology.- Deposition and Etching of Fluoropolymer Films by Plasma Technique.- Amorphous Carbon Films.- Materials Processing with Pulsed Electron Beam.- Ion Beam Treatment of Polymers.- UV Lasers and Polymers.- III: Contributed papers.- Kinetic Aspect of PACVD Modeling.- Advanced Technologies for ULSI Device Production.- Design/Operating Parameters Optimization of an Electron Accelerator for Surface Treatments on Materials through Irradiation.- CF4/O2 Plasma Etching of Polymers.- Laser Induced Surface Modification of Polymers.- Wetting Behavior of Oxygen Plasma Treated PTFE.- Author Index.