Volker Kempe

Inertial MEMS

• Gebundenes Buch

Produktbeschreibung

A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors.

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Produktdetails

• Verlag: Cambridge University Press
• Seitenzahl: 496
• Erscheinungstermin: 26. Februar 2019
• Englisch
• Abmessung: 250mm x 175mm x 31mm
• Gewicht: 1027g
• ISBN-13: 9780521766586
• ISBN-10: 0521766583
• Artikelnr.: 31891831

Autorenporträt

Volker Kempe has more than 40 years of experience in research and development. He led the microelectronics engineering department at Austria Mikro Systems for over ten years. In 2003 he co-founded and became Vice President of SensorDynamics AG, and his current interests focus on the functionality, technology, and application of inertial MEMS.

Inhaltsangabe

Preface
Acknowledgement
Notation
1. Introduction
2. Transducers
3. Non-inertial forces
4. MEMS - technologies
5. First level packaging
6. Electrical interfaces
7. Accelerometers
8. Gyroscopes
9. Test and calibration
10. Concluding remarks
Index.