Introduction to Silicon Microfabrication
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This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells and nanowires and building up to more complex examples such as power devices, MEMS, thin film transistors, CMOS and bipolar transistors, to illustrate his points. Materials, processes and the economics of microfabrication are discussed and simulation examples and measurement characteristics provided.- The author has based his material on his o...
This book will provide coverage of all aspects of the attempt to build functional devices at a molecular size. Emphasis is placed upon general principles and technologies. Franssila provides coverage of specific devices, beginning with simple solar cells and nanowires and building up to more complex examples such as power devices, MEMS, thin film transistors, CMOS and bipolar transistors, to illustrate his points. Materials, processes and the economics of microfabrication are discussed and simulation examples and measurement characteristics provided.
- The author has based his material on his own successful courses in the field.
- Includes end of chapter examples and exercises to test readers understanding of the key concepts.
- The author has based his material on his own successful courses in the field.
- Includes end of chapter examples and exercises to test readers understanding of the key concepts.