Introduction to VLSI Process Engineering

Herausgegeben:Naka, Y.; Sugawara, K.; McGreavy, C.

• Broschiertes Buch

Produktbeschreibung

Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.

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Produktdetails

• Verlag: Springer / Springer Netherlands
• Artikelnr. des Verlages: 978-94-010-4682-4
• Softcover reprint of the original 1st ed. 1993
• Seitenzahl: 228
• Erscheinungstermin: 21. Oktober 2012
• Englisch
• Abmessung: 235mm x 155mm x 13mm
• Gewicht: 353g
• ISBN-13: 9789401046824
• ISBN-10: 9401046824
• Artikelnr.: 39511965

Inhaltsangabe

1 Coming age of VLSI.- 1.1 Functionality.- 1.2 Use in consumer products.- 1.3 Impact on industry.- 1.4 Future trends.- 2 Semiconductor market.- 2.1 Features of the semiconductor industry.- 2.2 Types and classification of semiconductors.- 2.3 Expanding semiconductor market.- 2.4 Trends in associated industries.- 2.5 Future prospects.- 3 Evolution of semiconductors.- 3.1 History of semiconductor technology.- 3.2 Future developments.- 4 Characteristics of VLSI.- 4.1 Device structures.- 4.2 Memory types.- 4.3 Arrangement of VLSI devices.- 4.4 New devices.- 5 VLSI process engineering operations.- 5.1 Aspects of production.- 5.2 Basic processing technology.- 6 Packaging and process monitoring technology.- 6.1 Packaging.- 6.2 Process monitoring techniques.- 7 Production of silicon wafers and environmental problems.- 7.1 Silicon wafers.- 7.2 Chemicals used in VLSI processing.- 7.3 Environmental considerations.- 8 Process engineering aspects of VLSI production.- 8.1 Basic issues in processing.-8.2 Opportunities for innovation.- Appendix A Glossary.- Appendix B List of abbreviations.- References.

Rezensionen

...an extremely good text... - Microelectronics Journal