Ion Beam Induced Nanoscale Ripples on Si, TiO2 and Ti Surfaces - Fravventura, Maria C.
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In this work the roughening effect of grazing incidence ion-bombardment on a variety of inorganic surfaces is discussed. With a combination of experimental and theoretical investigations, the dynamic formation of nanoscopic periodic surface ripples is described as function of incident angle, ion fluence and temperature. Our results show the universality of the ripple formation on semiconducting, metallic and insulating surfaces. Among numerous promising applications, this research establishes the ion-bombardment technique as a valid bottom-up method for nano-patterning to be used as a…mehr

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Produktbeschreibung
In this work the roughening effect of grazing incidence ion-bombardment on a variety of inorganic surfaces is discussed. With a combination of experimental and theoretical investigations, the dynamic formation of nanoscopic periodic surface ripples is described as function of incident angle, ion fluence and temperature. Our results show the universality of the ripple formation on semiconducting, metallic and insulating surfaces. Among numerous promising applications, this research establishes the ion-bombardment technique as a valid bottom-up method for nano-patterning to be used as a cost-efficient alternative to conventional top-down lithography in semiconductors technology.
Autorenporträt
Maria Fravventura graduated in 2009 in Physics Engineering at Politecnico di Milano (Italy) after spending the last 7 months of her master program as guest researcher at Friedrich Schiller Universitaet (Jena, Germany). Since 2010 she is a PhD researcher in Applied Sciences at Delft University of Technology (The Netherlands).