With the construction of China's communication infrastructure, the continuous fermentation of intelligent terminals, as well as the construction of vehicles internet and smart city, it continues to inject power into China's IC industry. In addition, the active guidance of the Chinese government has further promoted the development of semiconductor manufacturing industry. It can be predicted that semiconductor industry in China will enter a golden age, and all this needs to be supported by strong micro-nano intelligent manufacturing. Moore's law reveals the speed of information technology progress: when the price remains unchanged, the components that can be accommodated on the integrated circuit will double every 18-24 months, and the performance will also double. Miniaturization and higher clock frequency have always been the main trend of semiconductor manufacturing. This book, further refined at Times Technology (Shenzhen) Co., Ltd, Shenzhen, China, has expanded our understanding towards the laser micro-nano intelligent manufacturing and relevant applications in semiconductor electronic materials.