Gebundenes Buch

Lithography

Main Techniques

Herausgegeben von Landis, Stefan

Beschreibung

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Autor

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

Produktdetails

• Verlag: Wiley & Sons
• 1. Auflage
• Seitenzahl: 320
• Erscheinungstermin: 20. Dezember 2010
• Englisch
• Abmessung: 234mm x 155mm x 28mm
• Gewicht: 744g
• ISBN-13: 9781848212022
• ISBN-10: 184821202X
• Artikelnr.: 32567669