Chapter headings and selected papers: Materials Deposition and
Microstructuring. Roughning and smoothing dynamics during KOH silicon
etching (R. Divan et al.). Silicon elastomer as a protective layer in 3D
microfabrication of micro-opto-electro-mechanical systems (P. Obreja et al.
). Growth of piezoelectric thin films with fine grain microstructure by
high energy pulsed laser deposition (F. Craciun et al.). Obtention and
characterization of bioengineered layers onto silica-based microstructures
(S. Falipou et al.). Microstructure of Cu-C interface in Cu-based metal
matrix composite (A. Berner et al.). Porous Silicon in Microsystems.
Porous silicon technique for realization of surface micromachined silicon
structures with large gaps (H. Artmann, W. Frey). Characterization.
Characterization of the nonlinear optical properties of crystals by the
SHEW technique (R. Kremer et al.). Bonding and Packaging. Devices.
Microstructures of the monomorph piezoelectric ceramic actuators with
functional gradients (X. Zhu et al.). Electrostatically actuated
micromirror devices in silicon technology (W. Lang et al.). A
thermoelectric converter for energy supply (H. Glosch et al.). Author
index. Subject index.
