Milton Ohring, Shefford P. Baker

Materials Science of Thin Films

Deposition and Structure

• Broschiertes Buch

Produktbeschreibung

Materials Science of Thin Films: Deposition and Structure, Third Edition, carries on the tradition of this intriguing series, offering the most comprehensive coverage of materials science and technology related to thin films and coatings of any book in the field. The authors' engaging style brings new coverage to a variety of important topics within the field, including the latest, and most important, deposition techniques, atomic layer deposition and high impulse magnetron sputtering, and new, or expanded, coverage of recent developments in thin films technology, such as filtered cathodic arcs, nanorod growth by the vapor-liquid-solid process, carbon nanotubes, new quantitative kinetic nucleation models, atomic-level growth classifications, bi-textured layers, surface morphological evolution models, and competitive grain growth.

Provides the most comprehensive coverage of materials science and technology related to thin films and coatings of any book in the field
Updated to include coverage of the latest and most important deposition techniques, including atomic layer deposition and high impulse magnetron sputtering
Includes new or expanded coverage of recent developments in thin films technology, such as filtered cathodic arcs, nanorod growth by the vapor-liquid-solid process, carbon nanotubes, new quantitative kinetic nucleation models, atomic-level growth classifications, and more
Carries on the tradition of this intriguing series, offering the latest information on the subject matter

Produktdetails

• Verlag: Academic Press
• 3. Aufl.
• Seitenzahl: 864
• Erscheinungstermin: 29. September 2016
• Englisch
• Abmessung: 235mm x 191mm x 69mm
• Gewicht: 1824g
• ISBN-13: 9780128498934
• ISBN-10: 0128498935
• Artikelnr.: 43672436

Inhaltsangabe

A Historical Perspective
Introduction to Thin Films
1. A Review of Materials Science
2. Vacuum Science and Technology
3. Thin-Film Evaporation Processes
4. Discharges, Plasmas, and Ion-Surface Interactions
5. Plasma and Ion Beam Processing of Thin Films
6. Chemical Vapor Deposition
7. Substrate Surfaces and Thin-Film Nucleation
8. Epitaxy
9. Film Structure
10. Characterization of Thin Films and Surfaces
11. Interdiffusion, Reactions, and Transformations in Thin Films
12. Mechanical Properties of Thin Films