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This book covers analysis, fabrication and characterization of piezoelectrically actuated valveless micropumps and process development and fabrication of hollow microneedles for transdermal drug delivery applications. Because of the complexity in analysis of piezoelectric micropump, which involves structural and fluid field couplings in a complicated geometrical arrangement, finite element (FE) numerical simulation rather than an analytical system has been used. The set of multifield simulations in the analysis have provided a valuable benchmark and prediction data as it allows transient, three dimensional, sequential piezoelectric and fluid analysis of the micropump, thereby facilitating a more realistic multifield analysis. Micropump fabrication and performance characterization has also been presented. Finally a process for fabricating hollow silicon out of plane microneedle arrays has been developed. Using a combination of isotropic etching and Bosch process, the high aspect ratio and high density microneedle arrays have been fabricated successfully. Structural and Microfluidic analysis of polymeric microneedles has also been discussed in the book.