Mems Resonator Filters

Herausgeber: Patrikar, Rajendra M

• Gebundenes Buch

Produktbeschreibung

This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed.

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Produktdetails

• Verlag: Institution of Engineering & Technology
• Seitenzahl: 432
• Erscheinungstermin: 15. Juni 2020
• Englisch
• Abmessung: 241mm x 163mm x 28mm
• Gewicht: 862g
• ISBN-13: 9781785618963
• ISBN-10: 1785618962
• Artikelnr.: 58414335

Inhaltsangabe

Chapter 1: Introduction
Chapter 2: Filter design
Chapter 3: Microelectromechanical resonators design: low-frequency resonators
Chapter 4: Microelectromechanical resonator design for high frequency
Chapter 5: Finite-element modeling of RF MEMS resonators
Chapter 6: Fabrication of low-frequency resonators
Chapter 7: Fabrication of high-frequency resonators
Chapter 8: Filter and oscillator design using SAW/BAW resonators
Chapter 9: Testing and verification of MEMS resonator filters
Chapter 10: 3D packaging for the integration of heterogeneous systems
Chapter 11: Reliability issues of MEMS resonators