Micro-electronic Processes for VLSI Fabrication
Debasis Mukherjee
Broschiertes Buch

Micro-electronic Processes for VLSI Fabrication

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"Micro-electronic Processes for VLSI Fabrication" is a comprehensive and authoritative guide that delves into the fundamental principles and advanced techniques used in the fabrication of Very Large Scale Integrated (VLSI) circuits. Covering a wide array of topics, the book begins with an in-depth introduction to Silicon Semiconductor Technology, including an overview of semiconductor materials, the crystal structure of silicon, intrinsic and extrinsic semiconductors, and the intricacies of doping and carrier concentration. Subsequent chapters delve into crucial aspects of VLSI fabrication, ex...