Microelectromechanical Systems - Materials and Devices IV

Volume 1299
Herausgeber: De Boer, Maarten P.; Eberl, Christoph; Delrio, Frank W.

• Broschiertes Buch

Produktbeschreibung

Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS/NEMS).

Produktdetails

• Verlag: Cambridge University Press
• Seitenzahl: 220
• Erscheinungstermin: 13. April 2012
• Englisch
• Abmessung: 229mm x 152mm x 12mm
• Gewicht: 326g
• ISBN-13: 9781107406834
• ISBN-10: 1107406838
• Artikelnr.: 40919835

Inhaltsangabe

Part I. Material Development and Optimization: 1. Biodegradable
microfluidic scaffolds with tunable degradation properties from amino
alcohol-based poly(ester amide) elastomers Jane Wang; 2. Measurements of
resonance frequency of parylene microspring arrays using atomic force
microscopy Churamani Gaire; 3. Gold in flux-less bonding: noble or not
noble Marco Balucani; 4. Giant piezoresistive variation of metal particles
dispersed in PDMS matrix Stefano Stassi; 5. Characterization of Group
III-nitride based surface acoustic wave devices for high temperature
applications J. Justice; 6. Transport model for microfluidic device for
cell culture and tissue development Niraj Inamdar; 7. Refractive index
memory effect of ferroelectric materials by domain control Kazuhiko Inoue;
8. Synthesis and control of ZnS nanodots and nanorods with different
crystalline structure from an identical raw material solution and the
excitonic UV emission Masato Uehara; 9. Improving PZT thin film texture
through Pt metallization and seed layers Luz Sanchez; Part II. Process
Integration: 10. Patterning nanomaterials on fragile micromachined
structures using electron beam lithography Srikar Vengallatore; 11. Pt/TiO2
growth templates for enhanced PZT films and MEMS devices Daniel Potrepka;
12. Contact resistivity of laser annealed SiGe for MEMS structural layers
deposited at 210°C Joumana El-Rifai; 13. PZT thick films for 100 MHz
ultrasonic transducers fabricated using chemical solution deposition
process Naoto Kochi; 14. Reliability and stability of thin-film amorphous
silicon MEMS on glass substrates Pedro Sousa; 15. High yield polymer MEMS
process for CMOS/MEMS integration V. Seena; 16. Characterization of
textured PZT thin films prepared by sol-gel method onto stainless steel
substrates Xuelian Zhao; Part III. Micro- and Nanosensors: 17. A picowatt
energy harvester Joseph Evans; 18. Mechanical and material characterization
of bilayer microcantilever-based IR detectors Xin Zhang; 19. Film
conductivity controlled variation of the amplitude distribution of
high-temperature resonators Silja Schmidtchen; 20. Ultrafine silicon
nano-wall hollow needles and applications in inclination sensor and gas
transport Zeinab Sanaee; 21. Development of a robust design for wet etched
co-integrated pressure sensor systems Reinhart Job; 22. SU8/modified MWNT
composite for piezoresistive sensor application V. Seena; 23. Thin film
amorphous silicon bulk-mode disk resonators fabricated on glass substrates
Alexandra Gualdino; 24. Fabrication and characterization of MEMS-based
structures from a bio-inspired, chemo-responsive polymer nanocomposite
Allison Hess; Part IV. Material and Device Reliability: 25. Characterizing
the effect of uniaxial strain on the surface roughness of Si nanowire
MEMS-based microstructures Enrique Escobedo-Cousin; 26. Mechanism of hole
inlet closure in shape transformation of hole arrays on Si(001) substrates
by hydrogen annealing Reiko Hiruta; 27. Characterisation of hydrophobic
forces in liquid self assembly of micron sized functional building blocks
Maurizio Gullo; 28. Nanoindentation characterization of PECVD silicon
nitride on silicon subjected to mechanical fatigue loading Kuo-Shen Chen;
29. Effect of phosphorus doping on the Young's modulus and stress of
polysilicon thin films Elena Bassiachvili; 30. Residual stress in sputtered
silicon oxycarbide thin films Xin Zhang; 31. Solid bridging during pattern
collapse (stiction) studied on silicon nanoparticles Daniel Peter; 32.
Fabrication and characterization of two compliant electrical contacts for
MEMS: gallium microdroplets and carbon nanotube turfs Yoonkap Kim.