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This book provides the information regarding the numerical & analytical study, design , fabrication and aplcation of micro electronics mechanical system used in celluler nanoporation . This book has been divided into nine chapters. The description of the chapter as stated hare under. The first and second chapter proides the Basic concept of cellular nanoporation and Electrical equivalency and Frequency Domain analysis of Trans membrane potential respectively . The third chapter gives the idea of window effect that is the main root cause of celluler nanoporation.The forth chapter describes the Analytical study of intraorganelle nanoporation under different . electrical stimuli and complete design of nanoporative micro mechanical system. Fifth, sixth and seenth chapters explores the details idea about Analytical and Numerical study of Pore current, membrane pressure and surface tension for nanoporation in MEMS.Along with this chapter eight shows the Effect of pressure, surface tension and rest potential on nanoporation under MEMS devices and the last chapter describes the Currents and future trends of MEMS device used in nanoporation.