Micromachining Techniques and Applications
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The extensive techniques and applications of micromachining are elucidated in this profound book. Micromachining is used to fabricate 3D microstructures and it is the base of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are the two most essential categories in this field. This book discusses the latest developments in micromachining technology. It offers reviews on diverse techniques and methods of micro/nano fabrications such as laser ablation, focused ion beams and various specialization techniques, compiled by eminent…mehr

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Produktbeschreibung
The extensive techniques and applications of micromachining are elucidated in this profound book. Micromachining is used to fabricate 3D microstructures and it is the base of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are the two most essential categories in this field. This book discusses the latest developments in micromachining technology. It offers reviews on diverse techniques and methods of micro/nano fabrications such as laser ablation, focused ion beams and various specialization techniques, compiled by eminent researchers and scientists around the world. It provides a comprehensive description of particular micromachining techniques, design, analytical studies, experimental paradigms and the final fabricated devices along with illustrative references regarding the various applications of this technique. Due to the multidisciplinary nature of this technology, this compilation will prove helpful to the scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.