Sergej Fatikow, Ulrich Rembold

Microsystem Technology and Microrobotics

• Broschiertes Buch

Produktbeschreibung

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Produktdetails

• Verlag: Springer / Springer Berlin Heidelberg / Springer, Berlin
• Artikelnr. des Verlages: 978-3-642-08232-0
• Softcover reprint of the original 1st ed. 1997
• Seitenzahl: 424
• Erscheinungstermin: 3. Dezember 2010
• Englisch
• Abmessung: 235mm x 155mm x 23mm
• Gewicht: 646g
• ISBN-13: 9783642082320
• ISBN-10: 3642082327
• Artikelnr.: 32058788

Autorenporträt

The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. Pictures and photos ease understanding and a wealth of references allow further work.

Inhaltsangabe

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.