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The present monographic work is a try to fill a gap in the existing scientific literature in a field important for industrial and technological approaches, as well as for basic and applied research. It is offered to all scientists, students and engineers fabricating YBCO thin films in research, technology, and in other fields. The spectrum of working areas covers spheres of activity such as solid-state physics, condensed-matter physics, applied physics, plasma physics, material science as well as special applications in such fields as microelectronics, fabrication techniques, radioelectronics, communication, and so on.