After a source study of historical oil paint surface cleaning methods, substances and materials, the development of surface investigations is shown. Special emphasis is placed on examinations with the scanning electron microscope, the low-pressure scanning electron microscope, laser profilometry and the 3D strip projection method based on micro mirrors. The latter, a system for optical measurement in the field of micro-electronics and dermatology, has been adapted for conservation and restoration purposes. For the first time, color surface changes caused by treatment can be measured and quantified. Acrylic colours show the limits of the 3D stripe projection method due to the material technology. Different substances are documented in their effect on historical oil paints, contemporary oil, oil/resin and acrylic paints. Procedures for time and cost efficient examination of work processes, methods and materials are formulated. Surface cleaning by laser beams is discussed. A gentle surface cleaning process for oil, oil/resin and acrylic paints has been developed.