This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.
This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.
Image Processing and Computer Vision for MEMS Testing. Image Correlation Techniques for Microsystems Inspection. Light Scattering Techniques for the Inspection of Microcomponents and Microstructures. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM). Optical Profiling Techniques for MEMS Measurement. Grid and Moiré Methods for Micromeasurements. Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents. Interference Microscopy Techniques for Microsystem Characterization. Measuring MEMS in Motion by Laser Doppler Vibrometry. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS. Optoelectronic Holography for Testing Electronic Packaging and MEMS. Digital Holography and Its Application in MEMS/MOEMS Inspection. Speckle Metrology for Microsystem Inspection. Spectroscopic Techniques for MEMS Inspection. Index.
Image Processing and Computer Vision for MEMS Testing. Image Correlation Techniques for Microsystems Inspection. Light Scattering Techniques for the Inspection of Microcomponents and Microstructures. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM). Optical Profiling Techniques for MEMS Measurement. Grid and Moiré Methods for Micromeasurements. Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents. Interference Microscopy Techniques for Microsystem Characterization. Measuring MEMS in Motion by Laser Doppler Vibrometry. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-Of-Plane Deformations of MEMS and MOEMS. Optoelectronic Holography for Testing Electronic Packaging and MEMS. Digital Holography and Its Application in MEMS/MOEMS Inspection. Speckle Metrology for Microsystem Inspection. Spectroscopic Techniques for MEMS Inspection. Index.
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