The book presents the study of ferroelectric oxide films, which have wide range of application in electronics. In recent years new development of oxide heterophase systems emerged. These based on oxide composition films are perspective photovoltaic for photoelectric converters. For this purpose, it is suitable to use Pb(Zr,Ti)O3 (PZT) with an excess PbO, these films are heterophase systems consist of ferroelectric PZT-grains and PbO released on crystallite boundary and forming semiconductor channels between electrodes. Different fabrication techniques for PZT films such as RF sputtering, PLD, MOCVD and Sol-gel method were compared. the Sol-Gel method emerged as the best method because of low temperature, excellent stoichiometry, ease of fabrication over large areas, ease to be integrated into existing silicon technology and low cost.