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Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion. With worked examples and over 100 in-text questions, this book will interest graduate students and researchers in applied physics and electrical engineering, helping them to develop physical arguments and mathematical analyses.

Produktbeschreibung
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion. With worked examples and over 100 in-text questions, this book will interest graduate students and researchers in applied physics and electrical engineering, helping them to develop physical arguments and mathematical analyses.
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Autorenporträt
Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.