Pascal Chabert, Nicholas Braithwaite

Physics of Radio-Frequency Plasmas

• Gebundenes Buch

Produktbeschreibung

Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

Produktdetails

• Verlag: Cambridge University Press
• Seitenzahl: 394
• Erscheinungstermin: 30. Juni 2015
• Englisch
• Abmessung: 250mm x 175mm x 26mm
• Gewicht: 859g
• ISBN-13: 9780521763004
• ISBN-10: 0521763002
• Artikelnr.: 31765952

Autorenporträt

Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

Inhaltsangabe

1. Introduction
2. Plasma dynamics and equilibrium
3. Bounded plasmas
4. Radiofrequency sheaths
5. Single frequency capacitively-coupled plasmas
6. Multi-frequency capacitively-coupled plasmas
7. Inductively-coupled plasmas
8. Helicon plasmas
9. Real plasmas
10. Electrical measurements
Index.