V P Savinov

Physics of Radiofrequency Capacitive Discharge

• Broschiertes Buch

Produktbeschreibung

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.

Produktdetails

• Verlag: Bsp Books Pvt. Ltd.
• Seitenzahl: 322
• Erscheinungstermin: 30. Juni 2020
• Englisch
• Abmessung: 231mm x 155mm x 20mm
• Gewicht: 499g
• ISBN-13: 9780367571627
• ISBN-10: 0367571625
• Artikelnr.: 69892075

Autorenporträt

V. P. Savinov

Inhaltsangabe

Foreword
Introduction
Abbreviations
1. Main physical properties and characteristics of radiofrequency
capacitive discharge
2. Physical properties of near-electrode layers of space charge of RF
capacitive discharge
3. Edge effects in the RF capacitive discharge
4. Near-electrode electron beams in RF capacitive discharge
5. Physical properties of RF gas discharge plasma
References
Index