Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization.- The Mechanism and kinetics of plasma polymerization.- Elementary processes at solid surfaces immersed in low pressure plasmas.
Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization.- The Mechanism and kinetics of plasma polymerization.- Elementary processes at solid surfaces immersed in low pressure plasmas.
Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization.- The Mechanism and kinetics of plasma polymerization.- Elementary processes at solid surfaces immersed in low pressure plasmas.
Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization.- The Mechanism and kinetics of plasma polymerization.- Elementary processes at solid surfaces immersed in low pressure plasmas.
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