Providing researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radiofrequency applications. To begin with, prototypical RF-MEMS devices, including lumped components and complex networks, are presented as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. The text explicitly treats the hard-to-predict interplay between…mehr
Providing researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radiofrequency applications.
To begin with, prototypical RF-MEMS devices, including lumped components and complex networks, are presented as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. The text explicitly treats the hard-to-predict interplay between the three-dimensional device structure and its electromagnetic functionality. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages, and simulation results are validated against experimental results.
With its design and simulation examples based on such widely-known software packages as ANSYS and the hardware description language Verilog, this guide will appeal to the practice-oriented R&D reader.
Jacopo Iannacci is Researcher in MEMS technology at the Fondazione Bruno Kessler - FBK in Trento, Italy, where he focuses on (compact) modeling, design, optimization, integration, packaging and testing for reliability of MEMS/RF-MEMS devices and networks for sensors/actuators, energy harvesting and telecommunication systems. He received the PhD in Information Technology from the ARCES Research Center of the University of Bologna, Italy, and worked as Visiting Researcher at the DIMES Technology Center of the Technical University of Delft, the Netherlands, on development of packaging and integration solutions for RF-MEMS devices. Jacopo Iannacci authored and co-authored numerous scientifi c contributions for international journals and conference proceedings, as well as books and several book chapters in the fi eld of MEMS and RFMEMS technology.
Inhaltsangabe
PREFACE
RF-MEMS APPLICATIONS AND THE STATE OF THE ART Introduction A Brief History of MEMS and RF-MEMS from the Perspective of Technology RF-MEMS Lumped Components RF-MEMS Complex Networks Modeling and Simulation of RF-MEMS Devices Packaging of RF-MEMS Brief Overview of Exploitation of RF-MEMS in RF Systems Conclusions
THE BOOK IN BRIEF Introduction A Brief Introduction to the FBK RF-MEMS Technology An RF-MEMS Series Ohmic Switch (Dev A) RF-MEMS Capacitive Switches/Varactors Conclusions
DESIGN Introduction Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology Design of an RF-MEMS Series Ohmic Switch (Dev A) Generation of 3D Models Starting from the 2D Layout Conclusions
SIMULATION TECHNIQUES (COMMERCIAL TOOLS) Introduction Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS Multiphysics Modal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSS? Conclusions
ON-PURPOSE SIMULATION TOOLS Introduction MEMS Compact Model Library A Hybrid RF-MEMS/CMOS VCO Excerpts of Verilog-A Code Implemented for MEMS Models Conclusions
PACKAGING AND INTEGRATION Introduction A WLP Solution for RF-MEMS Devices and Networks Encapsulation of RF-MEMS Devices Fabrication Run of Packaged Test Structures Electromagnetic Characterization of the Package Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices Conclusions
POSTFABRICATION MODELING AND SIMULATIONS Introduction Electromechanical Simulation of an RF-MEMS Varactor (Dev B2) with Compact Models RF Modeling of an RF-MEMS Varactor (Dev B2) with a Lumped Element Network Electromechanical Modeling of an RF-MEMS Series Ohmic Switch (Dev A) with Compact Models Electromagnetic Modeling and Simulation of an RF-MEMS Impedance- Matching Network (Dev E) for a GSM CMOS Power Amplifier Electromagnetic Simulation of an RF-MEMS Capacitive Switch (Dev B1) in ANSYS HFSS Electromagnetic Simulation of a MEMS-Based Reconfigurable RF Power Attenuator (Dev D) in ANSYS HFSS Conclusions
APPENDIX A RIGID PLATE ELECTROMECHANICAL TRANSDUCER (COMPLETE MODEL) Introduction Mechanical Model of the Rigid Plate with Four DOFs Extension of the Mechanical Model of the Rigid Plate to Six DOFs Contact Model for Rigid Plates with Four and Six DOFs Electrostatic Model of the Rigid Plate Electrostatic Model of the Plate with Holes Electrostatic Model of the Fringing Effect Viscous Damping Model Conclusions
APPENDIX B FLEXIBLE STRAIGHT BEAM (COMPLETE MODEL) Mechanical Model of the Flexible Beam with Two Degrees of Freedom Mechanical Model of the Flexible Beam with 12 DOFs Complete Mechanical Model of the Euler Beam with 12 DOFs ElectrostaticModel of the Euler Beamwith 12 DOFs Viscous Damping Model Conclusions
RF-MEMS APPLICATIONS AND THE STATE OF THE ART Introduction A Brief History of MEMS and RF-MEMS from the Perspective of Technology RF-MEMS Lumped Components RF-MEMS Complex Networks Modeling and Simulation of RF-MEMS Devices Packaging of RF-MEMS Brief Overview of Exploitation of RF-MEMS in RF Systems Conclusions
THE BOOK IN BRIEF Introduction A Brief Introduction to the FBK RF-MEMS Technology An RF-MEMS Series Ohmic Switch (Dev A) RF-MEMS Capacitive Switches/Varactors Conclusions
DESIGN Introduction Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology Design of an RF-MEMS Series Ohmic Switch (Dev A) Generation of 3D Models Starting from the 2D Layout Conclusions
SIMULATION TECHNIQUES (COMMERCIAL TOOLS) Introduction Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS Multiphysics Modal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSS? Conclusions
ON-PURPOSE SIMULATION TOOLS Introduction MEMS Compact Model Library A Hybrid RF-MEMS/CMOS VCO Excerpts of Verilog-A Code Implemented for MEMS Models Conclusions
PACKAGING AND INTEGRATION Introduction A WLP Solution for RF-MEMS Devices and Networks Encapsulation of RF-MEMS Devices Fabrication Run of Packaged Test Structures Electromagnetic Characterization of the Package Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices Conclusions
POSTFABRICATION MODELING AND SIMULATIONS Introduction Electromechanical Simulation of an RF-MEMS Varactor (Dev B2) with Compact Models RF Modeling of an RF-MEMS Varactor (Dev B2) with a Lumped Element Network Electromechanical Modeling of an RF-MEMS Series Ohmic Switch (Dev A) with Compact Models Electromagnetic Modeling and Simulation of an RF-MEMS Impedance- Matching Network (Dev E) for a GSM CMOS Power Amplifier Electromagnetic Simulation of an RF-MEMS Capacitive Switch (Dev B1) in ANSYS HFSS Electromagnetic Simulation of a MEMS-Based Reconfigurable RF Power Attenuator (Dev D) in ANSYS HFSS Conclusions
APPENDIX A RIGID PLATE ELECTROMECHANICAL TRANSDUCER (COMPLETE MODEL) Introduction Mechanical Model of the Rigid Plate with Four DOFs Extension of the Mechanical Model of the Rigid Plate to Six DOFs Contact Model for Rigid Plates with Four and Six DOFs Electrostatic Model of the Rigid Plate Electrostatic Model of the Plate with Holes Electrostatic Model of the Fringing Effect Viscous Damping Model Conclusions
APPENDIX B FLEXIBLE STRAIGHT BEAM (COMPLETE MODEL) Mechanical Model of the Flexible Beam with Two Degrees of Freedom Mechanical Model of the Flexible Beam with 12 DOFs Complete Mechanical Model of the Euler Beam with 12 DOFs ElectrostaticModel of the Euler Beamwith 12 DOFs Viscous Damping Model Conclusions
INDEX
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