Merlin Nsenkoue

Preparation and characterization of low-k material for microelectronics:

Possible development of mechanical characterization at submicrometric scales with laser ultrasonics technique

• Broschiertes Buch

Produktbeschreibung

On the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France).

Produktdetails

• Verlag: LAP Lambert Academic Publishing
• Seitenzahl: 84
• Erscheinungstermin: 6. Oktober 2021
• Englisch
• Abmessung: 220mm x 150mm x 6mm
• Gewicht: 143g
• ISBN-13: 9786204208480
• ISBN-10: 6204208489
• Artikelnr.: 62784971

Autorenporträt

Merlin M. Nsenkoue - Project / Programs /portfolio manager and strategic planning consultant in the areas of R&D / Innovation / Industrial. Passionate of challenges, Merlin's mandate himself to explore the world of project and program management and get out the best of it in the application of tools collected in R&D.