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This book presents award-winning research work on
two novel rotary gate microvalves developed for flow
modulation in microfluidic system. These are the
first electromagnetically actuated rotary gate
microvalves that provide some of the most desirable
attributes such as high open flow capacity,
mechanical bistability of the gate, non-contact and
fast acting electromagnetic actuation, multiple
fluidic ports,and high flow modulation. This work
encompasses engineering design, microfabrication,
and experimental evaluation of these microvalves in
three distinct areas micro compliant mechanism,
microfluidics, and electromagnetic actuation at
micro scale. A new class of micro compliant
mechanism that can perform a purely in-plane
rotational motion without the use of pin joints as
in microgear trains is presented. And new techniques
for high aspect ratio microfabrication and micro-
device testing is explained.
two novel rotary gate microvalves developed for flow
modulation in microfluidic system. These are the
first electromagnetically actuated rotary gate
microvalves that provide some of the most desirable
attributes such as high open flow capacity,
mechanical bistability of the gate, non-contact and
fast acting electromagnetic actuation, multiple
fluidic ports,and high flow modulation. This work
encompasses engineering design, microfabrication,
and experimental evaluation of these microvalves in
three distinct areas micro compliant mechanism,
microfluidics, and electromagnetic actuation at
micro scale. A new class of micro compliant
mechanism that can perform a purely in-plane
rotational motion without the use of pin joints as
in microgear trains is presented. And new techniques
for high aspect ratio microfabrication and micro-
device testing is explained.