Silicon Sensors and Actuators
Broschiertes Buch

Silicon Sensors and Actuators

The Feynman Roadmap

Herausgegeben: Vigna, Benedetto; Ferrari, Paolo; Villa, Flavio Francesco; Lasalandra, Ernesto; Zerbini, Sarah
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This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman's visionary talk "There is Plenty of Room at the Bottom" to propose that the time has come to see silicon sens...