Silicon Technologies
Ion Implantation and Thermal Treatment
Ed. by Annie Baudrant
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Specifically in the field of microelectronics, theself-fulfilling power of Moore's Law has driven an amazingpace of technological advances
This book explains the fundamental physical and chemical rulesin major front end treatments: oxidation, epitaxy, ion implantationand impurities diffusion .
This book explains the fundamental physical and chemical rulesin major front end treatments: oxidation, epitaxy, ion implantationand impurities diffusion .
The main purpose of this book is to remind new engineers in siliconfoundry, the fundamental physical and chemical rules in major Frontend treatments: oxidation, epitaxy, ion implantation and impuritiesdiffusion.
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