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This book gives an idea of modifications in fabrication steps of 22nm MOS transistor. A 22nm MOS transistor results are compared with a new modification process of stress.Their are two types of stress uniaxial and biaxial stress. Key Features: 1. Concept of Scaling. 2. Basic concept of MOS transistor. 3. Fabication process of 180nm MOS transistor. 4. Modified processes used in fabrication of 22nm MOS transistor.