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SISDEP '95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the…mehr

Produktbeschreibung
SISDEP '95 provides an international forum for the presentation of state-of-the-art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models describing all basic effects and sophisticated two and three dimensional tools for almost arbitrarily designed geometries. The book contains the latest results obtained by scientists from more than 20 countries on process simulation and modeling, simulation of process equipment, device modeling and simulation of novel devices, power semiconductors, and sensors, on device simulation and parameter extraction for circuit models, practical application of simulation, numerical methods, and software.
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Autorenporträt
Peter Pichler, Dr., geb. 1980, Studium der Geschichte, Philosophie und Medien in Graz und Mainz. Lektor am Institut für Geschichte der Karl-Franzens-Universität Graz, seit 2004 Mitarbeiter am Institut für Österreichische Rechtsgeschichte und Europäische Rechtsentwicklung ebenda. Veröffentlichungen zur Geschichte der europäischen Integration, zur Geschichte der europäischen Identität sowie zur österreichischen Geschichte.