Spatial Light Modulators and Applications
Spatial Light Modulators for Applications in Coherent Communication, Adaptive Optics and Maskless Lithography
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Optical MEMS (micro-electro-mechanical systems)devices have been used in a variety of applicationsincluding fiber-optic communications, projection TVsand in biomedical imaging. MEMS-based spatial lightmodulators (SLM) provide a compact, large scale, andcost-effective solution to these and otherapplications. In this book, we introduce the designand fabrication of SLMs for three such applications;coherent communication, adaptive optics and masklesslithography. This book should help not only thoseengineers working on these applications but in otherfields, such as biomedical imaging, to betterunde...
Optical MEMS (micro-electro-mechanical systems)
devices have been used in a variety of applications
including fiber-optic communications, projection TVs
and in biomedical imaging. MEMS-based spatial light
modulators (SLM) provide a compact, large scale, and
cost-effective solution to these and other
applications. In this book, we introduce the design
and fabrication of SLMs for three such applications;
coherent communication, adaptive optics and maskless
lithography. This book should help not only those
engineers working on these applications but in other
fields, such as biomedical imaging, to better
understand SLMs and their capabilites. This should
also help optical MEMS engineers and those new to the
field to gain some knowledge on the design and
fabrication process for developing MEMS mirror arrays.
devices have been used in a variety of applications
including fiber-optic communications, projection TVs
and in biomedical imaging. MEMS-based spatial light
modulators (SLM) provide a compact, large scale, and
cost-effective solution to these and other
applications. In this book, we introduce the design
and fabrication of SLMs for three such applications;
coherent communication, adaptive optics and maskless
lithography. This book should help not only those
engineers working on these applications but in other
fields, such as biomedical imaging, to better
understand SLMs and their capabilites. This should
also help optical MEMS engineers and those new to the
field to gain some knowledge on the design and
fabrication process for developing MEMS mirror arrays.
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