The demand for transition metal oxide materials is increasing rapidly for the fabrication of solar energy conversion devices such as heterojunction solar cells. Owing to considerable capabilities of silver copper oxide (Ag2Cu2O3) and copper nickel oxide (CuNiO2), these materials have been received for the fabrication of many optoelectronic devices. This book is mainly focused on the deposition of high-quality Ag2Cu2O3 and CuNiO2 thin films using RF magnetron sputtering technique. Systematic film deposition and discussion on structural, morphological, electrical and optical properties have been carried out and mentioned precisely in this book.