This book examines the different ion beam analysis techniques, which find relevant applications in the field of nanoscience. Ion beam analysis techniques are well established and have been widely used in materials sciences since the 1960s. Over the past two decades, the emergence of nanomaterials in science and technology has pushed many analytical techniques to their limits. This is also the case for techniques using an ion beam to probe nanoscale objects. The book discusses the various possibilities of the ion beam analysis for nanosciences and also seeks to position these techniques over other analytical tools.…mehr
This book examines the different ion beam analysis techniques, which find relevant applications in the field of nanoscience. Ion beam analysis techniques are well established and have been widely used in materials sciences since the 1960s. Over the past two decades, the emergence of nanomaterials in science and technology has pushed many analytical techniques to their limits. This is also the case for techniques using an ion beam to probe nanoscale objects. The book discusses the various possibilities of the ion beam analysis for nanosciences and also seeks to position these techniques over other analytical tools.Hinweis: Dieser Artikel kann nur an eine deutsche Lieferadresse ausgeliefert werden.
Denis Jalabert, CEA, France. Ian Vickridge, CNRS, France. Amal Chabli, CEA, France.
Inhaltsangabe
Introduction Fundamentals of ion-solid interactions with a focus on the nanoscale Channelling and blocking 1D layers: Limits to depth resolution 2D and 3D objects: Aspects of lateral resolution Porous materials / nanomaterials Instruments Grazing incidence RBS RBS-channelling/blocking High resolution RBS (magnetic or electrostatic filters) MEIS Resonant NRA The place of nanoIBA in the characterisation forest Applications Example of resonances, light element profiling 3D example / quantum dots and nanowires / top down devices Channelling / defect profiling Blocking / strain profiling 3D MEIS / Real space structural analysis Conclusion
Preamble ix
Introduction xi
Chapter 1 Fundamentals of Ion-solid Interactions with a Focus on the Nanoscale 1
1.1 General considerations 1
1.1.1 Wavelengths of ions, electrons and X-rays 1
1.1.2 Penetration depths of ions, electrons and X-rays 7
1.2 Basic physical concepts 8
1.2.1 Energy loss and range of ions in matter 8
1.2.2 Energy straggling 11
1.2.3 Elastic scattering 13
1.3 Channeling, shadowing and blocking 20
1.3.1 Channeling 20
1.3.2 Shadowing 23
1.3.3 Blocking 30
1.4 1D layers: limits to depth resolution 34
1.5 2D and 3D objects: aspects of lateral resolution 38
1.5.1 Beam focusing 38
1.5.2 Simulation of nanostructures 43
Chapter 2 Instruments and Methods 45
2.1 Instruments 45
2.1.1 Accelerators 45
2.1.2 Detectors and data acquisition 48
2.1.3 Analysis chambers 54
2.2 Methods 55
2.2.1 RBS and MEIS 56
2.2.2 ERDA 62
2.2.3 Narrow resonance profiling 64
Chapter 3 Applications 69
3.1 Example of resonances/light element profiling 69
3.1.1 Introduction 69
3.1.2 Channeling study of the SiO2/Si interface 70
3.1.3 Narrow resonance profiling and stable isotopic tracing studies of the oxidation of silicon 73
3.1.4 Thermal oxidation of silicon carbide 76
3.1.5 Diffusion and reaction of CO in thermal SiO2: transport, exchange and SiC nanocrystal growth 81
3.2 Quantitative analysis/heavy element profiling 86
3.2.1 RBS quantitative analysis of quantum dots and quantum wells 86
3.2.2 CMOS transistors and the race for miniaturization 114
3.3 Examples of HR-ERD analysis 131
3.3.1 Introduction 131
3.3.2 HRBS/HR-ERD comparison 132
3.3.3 HR-ERD profiles of Al2O3/TiO2 nanolaminates 133
3.4 Channeling/defect profiling 135
3.4.1 Introduction 135
3.4.2 Arsenic implant in ultra-shallow-junctions 135
3.5 Blocking/strain profiling 147
3.5.1 Introduction 147
3.5.2 GaN/AlN system 151
3.5.3 Si/Ge system 180
3.6 3D MEIS/real space structural analysis 195
3.6.1 Electrostatic analyzer method 196
3.6.2 Time-of-flight method 199
Chapter 4 The Place of NanoIBA in the Characterization Forest 203
4.1 Introduction 203
4.2 Scope of physical and chemical characterization 203
4.2.1 Targeted information by material characterization 204
4.2.2 Basic principle and instrumentation of material characterization 205
Introduction Fundamentals of ion-solid interactions with a focus on the nanoscale Channelling and blocking 1D layers: Limits to depth resolution 2D and 3D objects: Aspects of lateral resolution Porous materials / nanomaterials Instruments Grazing incidence RBS RBS-channelling/blocking High resolution RBS (magnetic or electrostatic filters) MEIS Resonant NRA The place of nanoIBA in the characterisation forest Applications Example of resonances, light element profiling 3D example / quantum dots and nanowires / top down devices Channelling / defect profiling Blocking / strain profiling 3D MEIS / Real space structural analysis Conclusion
Preamble ix
Introduction xi
Chapter 1 Fundamentals of Ion-solid Interactions with a Focus on the Nanoscale 1
1.1 General considerations 1
1.1.1 Wavelengths of ions, electrons and X-rays 1
1.1.2 Penetration depths of ions, electrons and X-rays 7
1.2 Basic physical concepts 8
1.2.1 Energy loss and range of ions in matter 8
1.2.2 Energy straggling 11
1.2.3 Elastic scattering 13
1.3 Channeling, shadowing and blocking 20
1.3.1 Channeling 20
1.3.2 Shadowing 23
1.3.3 Blocking 30
1.4 1D layers: limits to depth resolution 34
1.5 2D and 3D objects: aspects of lateral resolution 38
1.5.1 Beam focusing 38
1.5.2 Simulation of nanostructures 43
Chapter 2 Instruments and Methods 45
2.1 Instruments 45
2.1.1 Accelerators 45
2.1.2 Detectors and data acquisition 48
2.1.3 Analysis chambers 54
2.2 Methods 55
2.2.1 RBS and MEIS 56
2.2.2 ERDA 62
2.2.3 Narrow resonance profiling 64
Chapter 3 Applications 69
3.1 Example of resonances/light element profiling 69
3.1.1 Introduction 69
3.1.2 Channeling study of the SiO2/Si interface 70
3.1.3 Narrow resonance profiling and stable isotopic tracing studies of the oxidation of silicon 73
3.1.4 Thermal oxidation of silicon carbide 76
3.1.5 Diffusion and reaction of CO in thermal SiO2: transport, exchange and SiC nanocrystal growth 81
3.2 Quantitative analysis/heavy element profiling 86
3.2.1 RBS quantitative analysis of quantum dots and quantum wells 86
3.2.2 CMOS transistors and the race for miniaturization 114
3.3 Examples of HR-ERD analysis 131
3.3.1 Introduction 131
3.3.2 HRBS/HR-ERD comparison 132
3.3.3 HR-ERD profiles of Al2O3/TiO2 nanolaminates 133
3.4 Channeling/defect profiling 135
3.4.1 Introduction 135
3.4.2 Arsenic implant in ultra-shallow-junctions 135
3.5 Blocking/strain profiling 147
3.5.1 Introduction 147
3.5.2 GaN/AlN system 151
3.5.3 Si/Ge system 180
3.6 3D MEIS/real space structural analysis 195
3.6.1 Electrostatic analyzer method 196
3.6.2 Time-of-flight method 199
Chapter 4 The Place of NanoIBA in the Characterization Forest 203
4.1 Introduction 203
4.2 Scope of physical and chemical characterization 203
4.2.1 Targeted information by material characterization 204
4.2.2 Basic principle and instrumentation of material characterization 205
