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The metal alkoxides are the class of compounds having general formula M(OR)z (R=Alkyl/aryl group) wherein Md+-Od--C bonds are polarized in the shown direction. The variation in the polarity of the bond depends upon the electronegativity of the central metal (M), consequently the nature of metal alkoxides varies from covalent monomers to electrovalent polymeric solids. The volatility and solubility in common organic solvents of certain metal alkoxides has made them attractive precursors for depositing pure metal oxides by chemical vapour deposition (MOCVD) or by the sol-gel process. The extreme hydrolytic instability of the alkoxides in the sol-gel process is currently being controlled by addition of complexing reagents or by partial hydrolysis to obtain new molecular precursors with different structures, reactivities and functionalities than the parent alkoxide. The process has eventually been called the 'chemical modification' of metal alkoxides. These modified metal alkoxides follow different pathway of sol gel polymerization than their parent alkoxides which has a significant effect in the resulting metal oxides.