Advances progress in the deposition of single and binary metal oxides-containing thin films using gas phase processes has been intensively investigated during my PhD. The aim was to achieve clean materials which strives to reduce environmental emissions. A series of active and low-cost transition metal oxides were prepared, by means of pulsed spray evaporation chemical vapor deposition (PSE-CVD). In this work, the synthesis of a number of catalysts for the total oxidation of compounds that may be classified as VOCs (C3H6, n-C4H8, C2H6O), biofuel (C2H6O, n-C4H8O) and Carbon monoxide (CO) are reported, and the important features of the catalyst highlighted using oxygen as oxidant. The main objective is the catalytic oxidation of VOCs over single and mixed TMOs. We have investigated several typical metal oxides that are widely studied as the essential components for catalytic oxidation of CO and VOCs and explored the effect of some important influencing factors such as the redox andoptical properties, composition, doping, film morphology and the particle size of the metals oxides. The specific mechanisms involved in the catalytic activity process were investigated.