J. Mazumder, Aravinda Kar

Theory and Application of Laser Chemical Vapor Deposition

• Gebundenes Buch

Produktbeschreibung

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

Produktdetails

• Lasers, Photonics, and Electro-Optics
• Verlag: Springer / Springer US / Springer, Berlin
• Artikelnr. des Verlages: 978-0-306-44936-9
• 1995.
• Seitenzahl: 408
• Erscheinungstermin: 31. Oktober 1995
• Englisch
• Abmessung: 235mm x 157mm x 27mm
• Gewicht: 693g
• ISBN-13: 9780306449369
• ISBN-10: 0306449366
• Artikelnr.: 21810835

Inhaltsangabe

1. Introduction.- 2. Pyrolytic LCVD.- 3. Photolytic LCVD.- 4. Pyrolytic LCVD Modeling.- 5. Photolytic LCVD Modeling.- A.1. Definitions of Energy Density, Irradiance, and Intensity.- A.2. Thermal Stress Analysis.- A.3. Volumetric Absorption Rate.- Nomenclature.- References.